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基于空间光调制器LCOS-SLM的激光加工应用


图三:https://www.researchgate.net/publication/263319412_Fast_Micromachining_Using_Spatial_Light_Modulator_and_Galvanometer_Scanner_with_Infrared_Pulsed_Nanosecond_Fiber_Laser


图四:https://www.osapublishing.org/oe/abstract.cfm?uri=oe-22-3-2603



滨松LCOS特有的介质镜Dielectric Mirror专利,大大提高了以下三点性能:


1. 对强激光的功率阈值。同时提高了平均功率和脉冲激光的峰值功率。


2. 光利用率。即LCOS的反射率,介质镜可以使光强的损失降到最低。


3. 调制精度。主要影响LCOS的表面平整度,见下图:



针对不同激光器的详细功率阈值请见:http://share.hamamatsu.com.cn/specialDetail/730.html



50×50点阵图:


附1: 产品介绍
附2: 激光加工介绍英文版


【文献列表】



1. 使用(飞秒)贝塞尔光的无衍射特性,进行玻璃材料的纳米级烧蚀

http://www.ursi.org/proceedings/procGA11/ursi/D03-7.pdf

https://www.osapublishing.org/josaa/abstract.cfm?uri=josaa-31-4-790

https://hal.archives-ouvertes.fr/hal-00845925/document

2. High-speed uniform parallel 3D refractive index micro-structuring of poly(methyl methacrylate) for volume phase gratings

http://pcwww.liv.ac.uk/~kuang/Publications/Zheng%20Kuang's%20pulications_files/Journal/2010%20Applied%20Physic%20B.PDF

3. 使用混合的全息图用于材料加工的动态激光光束整形

https://www.sciencedirect.com/science/article/pii/S0030399217308976

4. 由三维焦场工程实现的波导单次扫描飞秒激光横向写入

https://www.osapublishing.org/oe/abstract.cfm?uri=oe-25-12-13263

5. Diffractive Multi-beam Ultra-fast Laser Microprocessing Using a Spatial Light Modulator

http://www.opticsjournal.net/Articles/Abstract?aid=OJ091218000077A8DaGc

6. Patterning of Aluminium thin film on polyethylene terephthalate by multi-beam picosecond laser

https://www.sciencedirect.com/science/article/pii/S0143816615000810

7. Ultrafast laser parallel microdrilling using multiple annular beams generated by a spatial light modulator

http://iopscience.iop.org/article/10.1088/0022-3727/47/11/115501/pdf

8. Parallel laser micromachining based on diffractive optical elements with dispersion compensated femtosecond pulses

https://www.osapublishing.org/oe/abstract.cfm?uri=oe-21-26-31830

9. Parallel microstructuring using femtosecond laser and spatial light modulator

https://www.sciencedirect.com/science/article/pii/S1875389213001491

10. Parallel femtosecond laser ablation with individually controlled intensity

https://www.osapublishing.org/oe/abstract.cfm?uri=oe-22-3-2603

11. Two-photon polymerization of cylinder microstructures by femtosecond Bessel beams

http://aip.scitation.org/doi/10.1063/1.4891841

12. Fast Micromachining Using Spatial Light Modulator and Galvanometer Scanner with Infrared Pulsed Nanosecond Fiber Laser

http://www.jlps.gr.jp/jlmn/upload/3b83009a198e9432d8205185f588d17f.pdf


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